Built by collaboration, the renovated Nanofabrication Core Facility empowers future research
By Jade Norden, University Communications
A researcher in the Nanofabrication Core Facility clean room uses the Keyence VHX-X1 Digital Microscope to test and process semiconductor materials.
Kris Hanning/Office of Research and Partnerships
An essential part of the University of Arizona's Center for Semiconductor Manufacturing, the Nanofabrication Core Facility provides infrastructure and expertise to support faculty, staff, students and industry partners in advancing tiny technologies with a big impact.
The recently renovated facility, located in the Electrical and Computer Engineering Building, reopened in February with new equipment, supporting product development and research in micro- and nanotechnology involving minuscule, specialized technologies used in semiconductors, electronics, healthcare, photonics and more.
NFC's clean room allows researchers to receive training and develop new techniques and products.
View photos from the renovation and research conducted inside the updated clean room in the gallery below.
New tools bring new opportunities
Research focused on next-generation computer and data communications technology and using AI and automation to accelerate materials research are just two examples of the type of projects the center supports.
The Nanofabrication Core Facility clean room expanded from 2,800 to approximately 6,800 square feet as part of an 18-month renovation project supporting future micro- and nanotechnology research.
"Having all of these tools here allows individuals, labs or companies to take their ideas, research and development and actually make something tangible that they can test," said Greg Book, director at NFC.
Greg Book
Those interested in working with NFC and using the specialized equipment are encouraged to contact Book, James Bohlman, research engineer at NFC, or submit a request through iLab. Book and Bohlman work closely with researchers to understand what's needed and see if it's feasible.
New participants complete safety training through Environmental Health and Safety, followed by site‑specific, face‑to‑face safety training at NFC. Then, they can schedule equipment and work independently, with staff always available to help if they need a refresher.
"We provide planning expertise, development experience, training and guidance to get them up and running quickly," said Book. "Between the two of us, we have nearly 70 years of experience in this field."
That expertise helps people get started quickly, with most researchers operating independently within two weeks of initial contact.
For those unable to visit NFC in person, a remote option is available where researchers can send materials, which Book and Bohlman process and return.
"Now that we have more space, equipment and a better facility, we're going to help grow high‑tech fabrication in Tucson," said Book. "It's exciting to work with researchers and see what they come up with. Being able to help in any way we can is really our goal – it's our mission – and it's exciting to see them succeed."
Learn more about working with the center on the NFC website.
Built through campus collaboration
Nearly 30 years after the center opened, major updates were recently completed to meet emerging research needs and support the campus community for decades to come.
Manny Teran, U of A alumnus and IRLabs CEO, and Krishna Muralidharan, professor of materials science and engineering, use the IREM-IV infrared microscope, donated by IRLabs, to test semiconductor materials in the Nanofabrication Core Facility clean room.
Kris Hanning/Office of Research and Partnerships
Expanding the clean room was a key part of the renovation, as it's crucial to prevent contamination, even from the tiniest particles, when working with such small systems. The clean room expanded from 2,800 to approximately 6,800 square feet and maintains an extremely low particle count, meeting ISO 5 standards as set by the International Organization for Standardization.
Extensive infrastructure was installed to maintain the clean room – systems that many will never see. This includes a new air filtration system that removes 99.999% of dust and particles, a high-capacity ultrapure water system that removes minerals from water and an automated wastewater neutralization system that makes the facility’s waste water safe for the public sewer system.
The complex project was completed in 18 months with a grant from the Arizona Commerce Authority. The tight timeline required 24/7 coordination.
Jon Ziegler
"We had no opportunity to backtrack," said Jon Ziegler, senior mechanical engineer for University Facility Services. "Daily, constant communication among the stakeholders and contractors was key."
Ziegler and Steve Mikitish, senior project manager for University Facility Services, coordinated with around two dozen vendors, contractors and university partners including Environmental Health and Safety.
"Having their expertise was critical," said Ziegler. "There are certain safety standards that apply here that don't necessarily apply to classrooms, offices, or even many chemical or biological labs."
The renovations were completed on time and under budget. "The people made it a success. It wasn't one person pushing it through. It was all my colleagues at the university and our business partners," added Ziegler.